120239-63-6 Purity
95%
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Specification
Lithium niobate (LiNbO3, LN) is often called a twisted perovskite crystal and is widely used in the field of photonics due to its ferroelectric properties.
· LN-based planar device technology: In a typical planar bulk LN crystal, the methods of introducing refractive index contrast to form waveguides or other confining structures can be divided into four main types: lithium out-diffusion, metal ion in-diffusion, proton exchange (PE), and ion implantation. They all form planar device configurations.
· Thin film lithium niobate (TFLN) preparation technology: Many different methods have been proposed to create TFLN, including crystal ion slicing (CIS), chemical vapor deposition (CVD), grinding and polishing.
· Etching technology: For bulk LN and TFLN, available etching technologies include dry etching (such as plasma of chemically active gases and inert ions), wet etching technology.
· LN-based functional devices: Compared with other material systems, LN has many unique properties, such as large EO, NLO, and AO effects. The developed high-quality TFLN together with various etching techniques have made significant progress in integrated LN photonics. Many different types of photonic devices fabricated in bulk LN have been demonstrated in TFLNs, including passive devices, EO devices, nonlinear optical devices, AO devices, rare-earth doped devices, pyroelectric devices, TO devices, etc.
This work investigates the dependence of waveguide propagation losses of Y-cut lithium niobate on insulator (LNOI) on buried oxide (BOX) thickness, waveguide width and planar orientation. Results show that a thickness of 1.5 µm can be a good compromise between photonic and acoustic performance.
Fabrication flow of Y-cut LNOI samples
· Three Y-cut LNOI samples were utilized in the study, each with a BOX thickness of 1 μm, 1.5 μm, and 2 μm respectively, to investigate how waveguide loss is affected by BOX thickness.
· Initially, photonic patterns such as grating couplers (GC), feeding waveguides in a "U" shape, and RT resonators were formed on CSAR 62 positive resist through electron-beam lithography.
· The LNOI film was etched using inductively coupled plasma reactive ion etching (ICP-RIE, Plasma-Therm Versaline) with specific parameters: Ar flow of 30 sccm, bias power of 100 W, ICP power of 600 W, and a pressure of 5 mT, resulting in an etching depth of approximately 300 nm. This etching recipe demonstrated a selectivity to CSAR 62 resist of 1:1.
· Following the etching process, any remaining electron-beam resist on the sample was eliminated through oxygen plasma cleaning. The final step involved cleaning the etched patterns using RCA (NH4OH, H2O2, and H2O mixed in a volume ratio of 1:1:5) at a temperature of 60°C for 30 minutes.
Important inorganic salt compounds
Lithium niobate has many unique properties and is very important in the photoelectric field.
The molecular weight of lithium niobate is 147.9 g/mol.
Lithium niobate was created on 2008-02-05 and last modified on 2023-12-02.
The IUPAC Name of lithium niobate is lithium;oxido(dioxo)niobium.
The Canonical SMILES of lithium niobate is [Li+].[O-][Nb](=O)=O.
The InChIKey of lithium niobate is GQYHUHYESMUTHG-UHFFFAOYSA-N.
There are 3 hydrogen bond acceptor counts in lithium niobate.
The topological polar surface area of lithium niobate is 57.2Ų.
There are 0 defined atom stereocenter counts in lithium niobate.
There are 2 covalently-bonded unit counts in lithium niobate.
Yes, the compound is canonicalized for lithium niobate.