Nanofabrication Service—AMOD Thermal Deposition System
Nanofabrication Service—Denton Thermal Evaporator
Nanofabrication Service—Cambridge Nano Fiji 200-ALD
Nanofabrication Service—Litho Process BSC-100 Spinner
Metrology Service—Filmetrics F54-UV Reflectometer
Metrology Service—Olympus BH-2 Optical Microscope
Metrology Service—Zygo NewView 7300 3D Surface Profiler
Metrology Service—Zeiss Axio Imager M2m Microscope-4
Wet Chemistry Service—Semitool 870 Spin Rinser/Dryer
Wet Chemistry Service—Semitool 880 Spin Rinser/Dryer
Wet Chemistry Service—Semitool 270 Spin Rinser/Dryer
Wet Chemistry Service—Copper Electroplater
Materials
Etching
Nanofabrication
Characterization
Nanomaterials
Wet Chemistry
Chemical Analysis
Polymer