Electron Microscope Imaging Service—Hitachi FB-2000A FIB

The FB-2000A can be considered a micro/nano machine shop. The FIB is normally configured with a TEM-style goniometer specimen introduction system. In the ACMAL facility, we currently utilize the FIB for two primary functions: TEM sample preparation and line pattern milling.
1. TEM prep can be carried out in the "in-situ" mode, using a micro-manipulator, where the partially prepared TEM wedge can be attached to the TEM grid inside the FIB and the post preparation can begin without removing the specimen.
2. Line patterning functions are carried out using the fabrication capabilities or the FIB. The FIB fabrication software facilitates rudimentary CAD drawing or importing of files.
3. Deposition of tungsten is provided for via software control. Two milling modes and seven aperture settings, all automated, provide users with high-speed milling or observation modes.
4. Sample sizes are limited to maxima of 5 mm × 10 mm × 1-2 mm thick for use of the goniometer sample system. Larger specimens can be accommodated in an SEM stage, although advance scheduling will be required for use of that stage.