Bis(trimethylsilyl)amidohafnium(iv)chloride

CAS

70969-29-8

Catalog Number

ACM70969298

Category

Micro/NanoElectronics

Molecular Weight

570.17

Molecular Formula

C₁₂H₃₆Cl₂HfN₂Si₄

MSDS COA Spec Sheet

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Specification

Synonyms

HAFNIUM BIS(HEXAMETHYLDISILAZIDE)DICHLORIDE;BIS(TRIMETHYLSILYL)AMIDOHAFNIUM(IV) CHLORIDE;Bis(trimethylsilyl)amidohafnium(IV) chloride, >=95%, 99.99+% metals basis

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